- Patent application: 2023-02-06
- Request for accelerated examination: 2023-02-07
- Request for prior art search: 2023-02-13
- Prior art search report: 2023-02-14
- Notice of preliminary rejection: 2023-10-30
- Amendment and written argument: 2023-11-25
- Decision to grant: 2024-01-22
- Registration: 2024-01-23
- Title of invention: Manipulator assembly module for ion implantation apparatus
[Note] This case proceeded under accelerated examination and was registered in about 12 months.
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